Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing

摘要

An arbitrary-wave-form modulated induction thermal plasma (AMITP) system was developed using a high-power semiconductor high-frequency power supply. The modulated high-power plasma is a breakthrough technique for controlling the temperature and the radical density in high-density plasmas. The arbitrary-wave-form modulation of the coil current enables more detailed control of the temperature of the high-density plasmas than the pulse-amplitude modulation that has already been developed. The Ar AMITP with intentionally modulated coil current could be generated at a power of 10-15 kW. Results showed that the Ar excitation temperature between the specified excitation levels was changed intentionally according to the modulation control signal. © 2007 American Institute of Physics.